Optimized comb-drive finger shape for shock-resistant actuation
نویسندگان
چکیده
منابع مشابه
CAD Modeling of Scratch Drive Actuation
Assembled MEMS structures provide a unique design opportunity by overcoming the inherent planarity of MEMS devices, allowing for added flexibility and new application areas. However, external assembly of these devices is frequently problematic. Force and displacement controls are often imprecise at the microscale resulting in damage to the device. In contrast, self-assembling MEMS structures ca...
متن کاملElectrostatic-comb Drive of Lateral Polysilicon Resonators
This paper mvestlgates the elcctrostatlc dnve and sense of polynhcon resonators parallel to the substrate, using an mterdlgtated capacitor (electrostatic comb) Three expenmental methods are used nucroscoplc observation mth contmuous or stroboscopic iummatlon, capacltlve sensing using an amphtude-modulation technique and SEM observation The mtnnslc quality factor of the phosphorus-doped low-pres...
متن کاملVertically supported two - directional comb drive ∗
Abstract A vertically supported comb drive with the feasibility of actuation in two perpendicular directions utilizing electrostatic force from interdigitated comb-shape electrodes has been demonstrated. The prototype microstructures are made of 2 μm thick polysilicon by a standard surface micromachining process. They are vertically lifted after the final sacrificial layer releasing process and...
متن کاملNote: an asymmetric flexure mechanism for comb-drive actuators.
This Note presents a new asymmetric flexure design, the double parallelogram-tilted-beam double parallelogram (DP-TDP) flexure, that enables two times higher stroke in electrostatic comb-drive actuators, compared to the traditional symmetrically paired double parallelogram (DP-DP) flexure, while maintaining the same device footprint. Because of its unique kinematic configuration, the DP-TDP fle...
متن کاملTransient characterisation and analysis of shape memory alloy wire bundles for the actuation of finger joints in prosthesis design
Shape Memory Alloys (SMA’s) are part of a new generation of lightweight, strong and relatively cheap actuators which have the potential to revolutionize the field of biomedical engineering. At present, DC motors are the most widely applied actuators employed in the design of prosthetic devices. These mechanical systems place restrictions on the number of degrees of freedom possible. SMA wires h...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2010
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/20/10/105003